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  Precision Etching Coating System (model 682)  

Producer:Gatan, Inc. USA

Date of installation:2006.04

Specifications:
Resolution£º0.1 nm
Coating Rate: 0.01 nm/sec
Sample Size£º¡Ü¦µ2 inch (5 cm)

Target Available: C, Cr, Pt, Au, Ag, W, Sn, Ta, Co, Mo, Ni

Main Functions:
Precision Etching Coating System


Manager:Liu Chang

Location:
Ke Tsing-Sui Building Room 520


 
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Address:72 Wenhua Road Shenyang, China 110016 Tel:86-24-23971788 83978238 Fax:86-24-23971215 Email:fli@imr.ac.cn